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GHz Optomechanical Wheel and Disk Resonators with High Mechanical Q Factors in Air

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Wheel- and disk-shaped Si optomechanical resonators are demonstrated with frequency up to 1.75 GHz and mechanical Q factors as high as 4370 at 1.41 GHz measured in air. Displacement sensitivity of 4.16×10−17 m/Hz1/2 is achieved.

© 2012 Optical Society of America

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