Abstract

We have developed and demonstrated a diode pumped solid state laser which produces 350 mJ per pulse in a 10 ns pulse length and currently runs at 650 Hz with near diffraction limited beam quality. The laser was primarily built to be a plasma driver producing x-rays at 130A for a projection lithography system. Numerous additional applications are anticipated for this state-of-the-art system including material processing at the fundamental wavelength and frequency tripling for applications requiring UV output.

© 1995 IEEE