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Although x-ray photoelectron spectroscopy (XPS) is the most important analytical method of material surfaces, spatial resolution of the conventional XPS with an x-ray tube source is awfully poor. Many efforts aré being paid to improve the spatial resolution, and high spatial resolution is achieved by a system using a synchrotron radiation source.1 However, XPS system of a sub-micron resolution is strongly desired to be a laboratory size, and we are developing a compact system with a laser-plasma x-ray source.
© 1995 IEEE
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