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Conferences > CLEOPR > 2001 > TuB1 > TuB1_2
  • The 4th Pacific Rim Conference on Lasers and Electro-Optics
  • Technical Digest Series (Optica Publishing Group, 2001),
  • paper TuB1_2

VUV Laser Micromachining and Bulk Modification of Photonic Materials

Jie Zhang, Peter R. Herman, K. Sugioka, and K. Midorikawa

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Abstract

In the paper, we report the surface patterning of wide-band-gap materials (GaN, SiC and fused silica), and the bulk modification of fused silica glasses in photosensitivity by use of VUV light sources, respectively.

© 2001 IEEE

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