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Conferences > CLEOPR > 2001 > TuB2 > TuB2_3
  • The 4th Pacific Rim Conference on Lasers and Electro-Optics
  • Technical Digest Series (Optica Publishing Group, 2001),
  • paper TuB2_3

Hole drilling of silica glass with infrared femtosecond laser pulses

Yan Li, Kazuyoshi Itoh, Wataru Watanabe, and Junji Nishii

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Abstract

We present experimental results of hole drilling of silica glass with infrared femtosecond laser pulses. High precision holes with diameter of 4μm and depth over 200μm were drilled from rear surface contacted with water.

© 2001 IEEE

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