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  • The 4th Pacific Rim Conference on Lasers and Electro-Optics
  • Technical Digest Series (Optica Publishing Group, 2001),
  • paper TuH4_1

Highly Ordered Hole-Array Architecture in Anodic Alumina for Optical Devices

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Abstract

A highly ordered nanohole-array architecture with high aspect ratios was fabricated based on the anodization of Al. In the report, two types of fabrication processes for highly ordered nanohole arrays, and their application to several kinds of nanofabrication for optical devices are described.

© 2001 IEEE

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