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Conferences > CLEOPR > 2007 > ThP > ThP_045
  • Conference on Lasers and Electro-Optics/Pacific Rim 2007
  • (Optica Publishing Group, 2007),
  • paper ThP_045

Surface functionalization of silicon micropillars spincoated with Er-doped YSO silicate nanoparticles

Heeyoung Go, Kiseok Suh, and Jung H. Shin

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Abstract

Optically active and electrically excitable silicon pillar structure is fabricated by electrochemical etching method. Silicon pillars structure is made by etching porous silicon layers in hydrofluoric acid-based solution. Afterwards, silicon pillars that are spin-coated with Er silicate show strong Er-related 1.53 µm photoluminescence.

© 2007 IEEE

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