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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Pacific Rim 2007
  • (Optica Publishing Group, 2007),
  • paper ThP_113

UV-Illuminated Buried-Type Optical Waveguide Devices on Benzocyclobutene

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Buried-type benzocyclobutene optical devices fabricated by UV-illumination are presented. The refractive index can be accurately controlled between 0.001 and 0.0038 by the proposed method. Experimental results show directional couplers and 1 × 2 multimode interference power splitters can be fabricated with high accuracy and good controllability.

© 2007 IEEE

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