Low-Stress Organic membrane for High-Resolution Variable Optical Attenuator

Chao-Hu Li; Chen-Wei E. Chiu; Tyng-Yow Chen; Guo-Dung J. Su

Conference on Lasers and Electro-Optics/Pacific Rim 2007
(Optica Publishing Group, 2007),
paper ThP_134

Low-Stress Organic membrane for High-Resolution Variable Optical Attenuator

Chao-Hu Li, Chen-Wei E. Chiu, Tyng-Yow Chen, and Guo-Dung J. Su

Conference on Lasers and Electro-Optics/Pacific Rim 2007

Seoul Republic of Korea
ISBN: 1-4244-1174-2

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Poster Session II (ThP)

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C. Li, C. E. Chiu, T. Chen, and G. J. Su, "Low-Stress Organic membrane for High-Resolution Variable Optical Attenuator," in Conference on Lasers and Electro-Optics/Pacific Rim 2007, (Optica Publishing Group, 2007), paper ThP_134.

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Abstract

A variable optical attenuator consisting of organic membrane has been fabricated by MEMS technology. The attenuation is achieved by changing the focal length of the deformable membrane. The attenuation range is 20dB with low PDL and actuated voltage is around 80V

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