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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Pacific Rim 2007
  • (Optica Publishing Group, 2007),
  • paper TuA2_1

Advances in High-Pulse Energy Excimer Laser and Applications

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Abstract

Pulsed excimer lasers offer a unique combination of high pulse energy and short pulse duration in the UV wavelengths. These characteristics combine to provide an exceptional photonics tool for the commercialization of novel applications such as Pulsed Laser Deposition in thin-film manufacturing, LTPS annealing in FPD, surface hardening in Automotive, and direct patterning in Advanced Packaging markets.

© 2007 IEEE

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