Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > CLEOPR > 2007 > TuA3 > TuA3_3
  • Conference on Lasers and Electro-Optics/Pacific Rim 2007
  • (Optica Publishing Group, 2007),
  • paper TuA3_3

Laser-Imaging of Laser-Produced Tin Plume Behavior for EUV Light Source

Daisuke Nakamura, Yuki Hashimoto, Koji Tamaru, Akihiko Takahashi, and Tatsuo Okada

Not Accessible

Your library or personal account may give you access

Abstract

Debris, generated form a laser-produced Sn plasma extreme-ultraviolet source for the next generation optical lithography, was investigated by the laser-induced fluorescence (LIF) imaging for Sn atoms and a Faraday cup for ionic species. The sputtering by the fast ions from the plasma was also investigated by the LIF method.

© 2007 IEEE

PDF Article
More Like This
Production of Sn-Droplets as a Target of Laser-Produced Plasma for Debris-Free EUV Light Source

Koji Tamaru, Daisuke Nakamura, Akihiro Takahashi, and Tatsuo Okada
TuA3_4 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2007

Diagnostics of Ablation Dynamics of Tin micro-Droplet for EUV Lithography Light Source

D. Nakamura, K. Okazaki, T. Akiyama, K. Toya, A. Takahashi, T. Okada, T. Yanagida, Y. Ueno, Y. Sasaki, T. Suganuma, M. Nakano, H. Komori, A. Sumitani, and A. Endo
TuJ3_4 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2009

EUV light source by high power laser

Y. Izawa, K. Nishihara, H. Nishimura, S. Fujioka, T. Aota, Y. Shimada, M. Yamaura, E. Fujiwara, A. Sunahara, M. Murakami, K. Nagai, T. Norimatsu, A. Sasaki, H. Tanuma, N. Miyanaga, and K. Mima
TuA3_1 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2007

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use