Abstract
An integrated electromagnetic field sensor using Z-cut LiNbO3 Mach-Zehnder waveguide modulator and micro antenna was fabricated and measured. A coplanar waveguide antenna was directly integrated with the traveling-wave electrode of the Mach-Zehnder waveguide modulator on the same LiNbO3 substrate. The minimum detectable electric field strength is 8.91 ×10−4V/m at 2GHz.
© 2007 IEEE
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