Femtosecond laser processing of fused silica to create integrated microsystems

Yves Bellouard

Conference on Lasers and Electro-Optics/Pacific Rim 2009
(Optica Publishing Group, 2009),
paper MJ1_1

Femtosecond laser processing of fused silica to create integrated microsystems

Yves Bellouard

Conference on Lasers and Electro-Optics/Pacific Rim 2009

Shanghai China
30 August–3 September 2009
ISBN: 978-1-4244-3830-3

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Fettosecond Laser Processing I (MJ1)

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Y. Bellouard, "Femtosecond laser processing of fused silica to create integrated microsystems," in Conference on Lasers and Electro-Optics/Pacific Rim 2009, (Optica Publishing Group, 2009), paper MJ1_1.

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Abstract

Low-energy femtosecond laser pulses can be used to introduce various functionalities in fused silica that can be combined or distributed to form integrated microsystems suitable for optofluidics and optomechanics applications.

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