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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Pacific Rim 2009
  • (Optica Publishing Group, 2009),
  • paper TUP13_14

The effect of scanning speed fluctuation to the precision of size measurement by laser scanning

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Abstract

This paper analyzes details the effect of scanning speed fluctuation to the precision of size measurement by laser scanning and proposes two on-line compensation methods. They have been proved to be applicable and feasible.

© 2009 IEEE

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