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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Pacific Rim 2009
  • (Optica Publishing Group, 2009),
  • paper TUP13_24

Autofocusing Method for Precise Nanofabrication using Two-Photon Photopolymerization

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Abstract

The total fluorescence by two-photon photopolymerization is used for focusing the laser beam on the surface of a glass substrate automatically. By using this method the 3-D structures are fabricated on the substrate without any loss of the bottom.

© 2009 IEEE

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