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Conferences > CLEOPR > 2009 > TUP > TUP6_32
  • Conference on Lasers and Electro-Optics/Pacific Rim 2009
  • (Optica Publishing Group, 2009),
  • paper TUP6_32

APCVD Preparation of TiNxOy film for multi-functional coating glass

Gangfeng Duan, Gaoling Zhao, Xiaoxuan Lin, Tianbo Zhang, and Gaorong Han

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Abstract

A simple atmospheric pressure chemical vapor deposition method was employed to deposit TiNxOy film on glass substrate. The obtained film combined the solar control performance and self-cleaning properties, which was suitable for multi-functional coating glass.

© 2009 IEEE

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