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Conferences > CLEOPR > 2009 > ThB2 > ThB2_2
  • Conference on Lasers and Electro-Optics/Pacific Rim 2009
  • (Optica Publishing Group, 2009),
  • paper ThB2_2

High Harmonic Generation by Plasmonic Enhancement of Femtosecond Laser Pulses

Seungchul Kim, In-Yong Park, and Seung-Woo Kim

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Abstract

Plasmonic enhancement of femtosecond laser pulses using a bow-tie metallic nanostructure enables the high harmonic generation of EUV radiation for high-resolution lithography, imaging, and spectroscopy.

© 2009 IEEE

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