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Conferences > CLEOPR > 2009 > TuE1 > TuE1_4
  • Conference on Lasers and Electro-Optics/Pacific Rim 2009
  • (Optica Publishing Group, 2009),
  • paper TuE1_4

The method for dual-beam laser heterodyne ultra-precision measurement of the glass thickness

Yanchao Li, Yanling Yang, Xuesong Xia, Long Gao, Haifang Cong, and Chunhui Wang

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Abstract

A method for measuring thickness of glass is proposed based on laser heterodyne measurement and Doppler measurement, the largest error of simulation results is 0.8%.

© 2009 IEEE

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