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  • Conference on Lasers and Electro-Optics/Pacific Rim 2009
  • (Optica Publishing Group, 2009),
  • paper WE2_2

Profilometry based on optical frequency comb

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Abstract

We present a frequency-comb-based interferometric microscope. Broadband optical frequency comb (OFC) was generated using optical pulse synthesizer and non-linear fiber as the light source of interferometer. Three-dimensional surface profile was successfully observed with a resolution of 44μm and measurement speed of 30 frame/s.

© 2009 IEEE

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