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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Pacific Rim 2009
  • (Optica Publishing Group, 2009),
  • paper WJ1_1

Laser-based Digital Microfabrication

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Laser transfer techniques are becoming widely used for digital microfabrication applications. These non-lithographic processes can generate high-resolution patterns of complex materials without negatively affecting their properties for many applications including microelectronics, micro-power sources and MEMS.

© 2009 IEEE

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