Abstract
We report about design, fabrication and properties of the polymer optical microring resonator and coupled optical microring resonator filters operating at 1490 nm. The resonator was fabricated by using Epoxy Novolak Resin onto silica on silicon substrate. We started with designing single mode rib waveguides by using BeamPROP software and the obtained results were then capitalized to design microring resonator by using FullWAVE software, which is part of the RSoft software. The design of the MR has FWHM 22 nm and FSR 44 nm and the resonator was fabricated by using electron beam lithography.
© 2011 AOS
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