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Conferences > CLEOPR > 2011 > PSM > C257
  • Proceedings of the International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011
  • (Optica Publishing Group, 2011),
  • paper C257

Fabrication process for optically low loss Si cantilever waveguide

F. Jiang, A. Keating, M. Martyniuk, L. Faraone, and J. M. Dell

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Abstract

Finite difference time domain (FDTD) was used to model through a waveguide consisting of a deflecting cantilever butt-coupling into a fixed waveguide. Adequate dynamic range for signal modulation has been shown in the dependence of the signal transmitted power on the cantilever deflection has been presented for fabrication. Effects towards fabrication of modulated structure revealed stress gradients in SOI’s top Si layer that serves for cantilever structure.

© 2011 AOS

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