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  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper MM1_5

Inter-Layer Grating Coupler with Metal Mirrors for 3D Optical Interconnects

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Abstract

Inter-layer coupling between multilayer waveguides was demonstrated using a hydrogenated amorphous silicon (a-Si:H) grating couplers. The grating couplers consist of two vertically stacked waveguides sandwiched by metal mirrors. An enhancement of the coupling efficiency was observed by introducing metal mirrors.

© 2013 IEICE

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