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Conferences > CLEOPR > 2013 > ThE3 > ThE3_1
  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper ThE3_1

Dependence on Repetition Rate in Post-Laser Annealing Process of Ion-Implanted ZnO Nanorods Using KrF Excimer Laser

T. Shimogaki, T. Ofuji, M. Higashihata, H. Ikenoue, D. Nakamura, T. Asano, and T. Okada

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Abstract

P-implanted ZnO nanorods were annealed by a KrF excimer laser at different repetition rate. The entire implanted region of ZnO nanorods was annealed beyond the optical-absorption length at high repetition rate.

© 2013 IEICE

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