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Optica Publishing Group
  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper ThE3_3

Influence of Grit-Size and Sintering Temperature on SiC TargetDuringPulsed Laser Deposition

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Abstract

Pulsed laser deposition of SiC thin films on N-type Si (100) substratewas studied by using an Nd3+: YAG laser.SiC target with agrit-count of 500 and sintered at 1600 °C was found suitable.

© 2013 IEICE

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