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Optica Publishing Group
  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper ThF1_2

Experimental Evaluation of Vibration Sensor Based on Interferometer with Phase Modulated Light

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Abstract

Simple and accurate vibration sensor using an interferometer with phase-modulated light is demonstrated. The measurement error is experimentally evaluated. The displacement measurement of a PZT mirror vibrating at 75 kHz is compared with conventional methods.

© 2013 IEICE

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