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  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper TuE1_4

Three Dimensional Functional Microfluidic Chips Fabricated by Hybrid Femtosecond Laser Microfabrication

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Abstract

We propose a novel strategy which fuses femtosecond laser TPP and FLAE to integrate 3D complex polymer microdevices into glass-based microfluidic devices for highly functional applications. 3D microfilters were fabricated, showing excellent filtering functions.

© 2013 IEICE

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