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Conferences > CLEOPR > 2013 > TuPH > TuPH_3
  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper TuPH_3

Nanoindentation Hardness and Elastic Modulus of AlGaN Alloys

Y. Tokumoto, H. Taneichi, Y. Ohno, K. Kutsukake, H. Miyake, K. Hiramatsu, and I. Yonenaga

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Abstract

Nanoindentation hardness tests were conducted on various AlxGa1-xN alloys grown by metal-organic vapor-phase epitaxy. AlGaN alloys showed the hardness of 16.5−19.5 GPa strongly dependent on the alloy composition with a maximum at x~0.5, while the Young’s modulus was ~ 300GPa, almost constant in the whole composition range investigated. The observed alloy hardening was confirmed under considering the effects of residual in-plane strain and threading dislocation densities.

© 2013 IEICE

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