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Conferences > CLEOPR > 2013 > TuPI > TuPI_29
  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper TuPI_29

Fabrication and Application of Structured Nanofiber on Chip

Kazuhiro Yamamoto, Shiyoshi Yokoyama, and Akira Otomo

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Abstract

We proposed the fabrication method of nanofibers on Si substrate using FIB milling and selective wet etching for integrated optical applications. The diameter of nanofiber could be well-controlled from 2 μm to 300 nm.

© 2013 IEICE

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