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Optica Publishing Group
  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper WE1_2

Fabrication of Functional Micro- and Nanofluidics Embedded in Glass Using Femtosecond Laser Microprocessing

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We resolve long-standing difficulties in fabrication of large-scale 3D microfluidics and demonstrate fabrication of nanochannels of a width of ~40 nm (~1/20 of writing beam wavelength) in glass with femtosecond laser pulses.

© 2013 IEICE

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