Abstract
Using nanoimprint lithography, we fabricate GaN nanostructures with semipolar quantum wells on 2-inch c-oriented substrates and embed them within a planar waveguide to create a separate confinement heterostructure. Electroluminescence, transmission electron microscopy (TEM) and spatially resolved cathodoluminescence inside a scanning TEM (STEM-CL) is applied.
© 2013 IEICE
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