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Conferences > CLEOPR > 2013 > WPC > WPC_4
  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper WPC_4

Nondestructive inspection of SiGe films using laser terahertz emission microscopy

Akihiro Nakamura, Ken Omura, Kenji Sakai, Toshihiko Kiwa, and Keiji Tsukada

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Abstract

Laser terahertz emission microscopy was applied to investigate the SiGe film on the Si substrate. In this study, as the initial experiment to apply LTEM to non-destructive evaluation of the strained SiGe films, the THz emission properties of the strained-SiGe were measured.

© 2013 IEICE

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