Abstract
We report selective etching of mm-length direct laser written three-dimensional microstructures inside Nd:YAG crystals. The structures exhibit enhanced etching selectivity compared to unmodified YAG. Origin of this selectivity is investigated using Nd3+ micro-spectroscopy and micro-Raman.
© 2013 IEICE
PDF ArticleMore Like This
Liang (Leon) Yuan and Peter R. Herman
CTh1J.4 CLEO: Science and Innovations (CLEO:S&I) 2013
André Radke, Benjamin Fries, Dirk Eicke, Fabian Niesler, Clemens Baretzky, Tiemo Bückmann, Martin Wegener, and Michael Thiel
ATu2N.4 CLEO: Applications and Technology (CLEO:A&T) 2013
Y. Liao, C. Liu, F. He, L. Qiao, Y. Cheng, K. Sugioka, and K. Midorikawa
CM1H.1 CLEO: Science and Innovations (CLEO:S&I) 2013