Vibration assisted femtosecond laser hole drilling on Fine Metal Mask for AMOLED

Wonsuk Choi; Wonsuk Choi; Sung Hak Cho; Sung Hak Cho

2015 Conference on Lasers and Electro-Optics Pacific Rim
(Optica Publishing Group, 2015),
paper 25D3_5

Vibration assisted femtosecond laser hole drilling on Fine Metal Mask for AMOLED

Wonsuk Choi and Sung Hak Cho

Conference on Lasers and Electro-Optics/Pacific Rim 2015

Busan Republic of Korea
24–28 August 2015
ISBN: 978-1-4673-7110-0

From the session
Novel Laser Process for Electroniz Devices (25D3)

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W. Choi and S. H. Cho, "Vibration assisted femtosecond laser hole drilling on Fine Metal Mask for AMOLED," in 2015 Conference on Lasers and Electro-Optics Pacific Rim, (Optica Publishing Group, 2015), paper 25D3_5.

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Abstract

Using vibration assisted femtosecond laser machining system, we can control hole taper angle directly by adjusting amplitude of vibration.

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