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Conferences > CLEOPR > 2015 > 25J1 > 25J1_3
  • 2015 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2015),
  • paper 25J1_3

Apodized Amorphous Silicon Grating Coupler with Metal Mirrors for 3D optical Interconnection

Yuki Kuno, Joon Hyun Kang, Kazuto Itoh, Yusuke Hayashi, Junichi Suzuki, Tomohiro Amemiya, Nobuhiko Nishiyama, and Shigehisa Arai

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Abstract

Inter-layer coupling between multilayer waveguides was demonstrated using hydrogenated amorphous silicon (a-Si:H) grating couplers with metal mirrors. The fabricated device which has the inter-layer distance of 2 µm successfully showed wider bandwidth compared with uniform grating structure.

© 2015 IEEE

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