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  • 2015 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2015),
  • paper 26D3_3

Physical Model for Subsurface Silicon Writing

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Abstract

We have recently reported a direct laser writing method enabling buried structures deep inside silicon. Here we study the formation of these subsurface structures. We take advantage of Nonlinearity Engineering to understand this new phenomenon.

© 2015 IEEE

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