Experimental and Numerical Investigation of Laser-based Short Wavelength Plasma Sources

H. Parchamy; J. Szilagyi; M. Masnavi; M. Richardson

2015 Conference on Lasers and Electro-Optics Pacific Rim
(Optica Publishing Group, 2015),
paper 26D3_5

Experimental and Numerical Investigation of Laser-based Short Wavelength Plasma Sources

H. Parchamy, J. Szilagyi, M. Masnavi, and M. Richardson

Conference on Lasers and Electro-Optics/Pacific Rim 2015

Busan Republic of Korea
24–28 August 2015
ISBN: 978-1-4673-7110-0

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Novel Laser and Optical Technologies in Manufacturing I (26D3)

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H. Parchamy, J. Szilagyi, M. Masnavi, and M. Richardson, "Experimental and Numerical Investigation of Laser-based Short Wavelength Plasma Sources," in 2015 Conference on Lasers and Electro-Optics Pacific Rim, (Optica Publishing Group, 2015), paper 26D3_5.

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Abstract

Laser-based plasma lamps are of particular interest in the semiconductor industry. This study examines the optimum regions of laser-plasma operational space for a number of intense laser-irradiated mass-limited droplet source scenarios.

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