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  • 2015 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2015),
  • paper 26F3_6

Displacement measurement by Single-grating heterodyne Interferometry

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Abstract

We presented a displacement measurement system based on single-grating heterodyne interferometry. Our prototype system was demonstrated to achieve a relative measurement accuracy of better than 69 nm with standard deviations of less than 28 nm.

© 2015 IEEE

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