Abstract

We fabricated micro-lens array on fused silica glass using femtosecond and CO₂ laser. We micro-machined periodic micro-grooves on the glass surface with femtosecond laser, and polished the patterned surface with CO₂ laser. We confirmed that curvature was formed on the surface by heat from the CO₂ laser beam as the surface roughness was removed. Depending on the fabricated pattern size, we could fabricate micro-lens array with controlling sizes. Using such this laser fabrication technique, we have demonstrated micro-lens array with various dimension.

© 2015 IEEE