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  • 2015 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2015),
  • paper 27J2_4

Membrane-based high efficiency metallic grating couplers for integrated photonics

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We developed a novel buried metal grating coupler for membrane platforms. We experimentally demonstrated a chip-to-fiber coupling efficiency of 56%, which makes them an attractive building block for on-wafer testing and dense optical interconnects.

© 2015 IEEE

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