Abstract
2D analytical model (Ko et al. (2016)) based on the geometry of the commercial coater system can calculate more effectively the profiles of LVFs. The model and experimental results (within 25% - 75% thickness range) for LVF zone width, transmission spectrum and a thin film profile measurement of LVF shows good agreement with high degree of accuracy and the profile distribution exhibits a high degree of linearity.
© 2017 Optical Society of America
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