Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • 2017 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2017),
  • paper s1595

Extension of Germanium-on-Insulator Optical Absorption Edge using CMOS-Compatible Silicon Nitride Stressor

Not Accessible

Your library or personal account may give you access

Abstract

Numerical study on the effect of an external stressor material, silicon nitride (SiN), on the tensile strain enhancement of Germanium waveguide-on-insulator (Ge WG-OI) was performed. The enhanced tensile strain shrinks Gebandgap which leads to extension of optical absorption edge towards longer wavelength. It was found that 1GPa tensile SiN (400nm) would introduce ~0.65% uniaxial tensile strain (along WG width direction) in Ge WG with 0.5μm width and extend the Г-valley-light-hole absorption edge to ~1658nm. Tensile strain-enhanced Ge WG-OI was also experimentally demonstrated. These studies pave the way for an on-chip tensile-strained Gephotodetector with improved performance comparable to InGaAs-based detectors. This technique is completely CMOS-compatible and could also be applied to other Ge-based on-chip active device design such as lasers.

© 2017 Optical Society of America

PDF Article
More Like This
Uniformly Tensile-strained Germanium Enabled by a Recessed Nitride Stressor for Efficient Integrated Photodetectors at Longer Wavelengths

Yiding Lin, Danhao Ma, Rui-Tao Wen, Kwang Hong Lee, Xin Guo, Jin Zhou, Hong Wang, Chuan Seng Tan, and Jurgen Michel
STh4O.2 CLEO: Science and Innovations (CLEO:S&I) 2019

Stress and structure optimizations with side silicon nitride stressors for Ge-on-Si lasers

Jiaxin Ke, Zhiqiang (Leo) Li, Simon Li, and Guangrui (Maggie) Xia
IW1A.5 Integrated Photonics Research, Silicon and Nanophotonics (IPR) 2016

Strained Germanium Membrane using Thin Film Stressor for High Efficiency Laser

Donguk Nam, Arunanshu M. Roy, Kevin C. Y. Huang, Mark L. Brongersma, and Krishna C. Saraswat
JTuI85 CLEO: Applications and Technology (CLEO:A&T) 2011

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved