Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • 2017 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2017),
  • paper s1633

MOEMS Accelerometer Based On Grating Coupler Integrated With Embossed Diaphragm

Not Accessible

Your library or personal account may give you access


A novel MOEMS accelerometer based on grating coupler integrated with embossed diaphragm has been presented in this paper. The device uses intensity based measurements at a wavelength of 900 nm and has a range of 7g. With a silicon photo-detector of sensitivity -60dBm, this accelerometer gives a sensitivity of 25µg of external acceleration.

© 2017 Optical Society of America

PDF Article
More Like This
A high-temperature endurable MOEMS accelerometer based on 6H-SiC

Li Hui, Liu Liying, Huang Tingfeng, Feng Lishuang, and Zhou Zhen
SeW3D.7 Optical Sensors (Sensors) 2016

Integrated Silicon Nitride based TE Dual-band Grating Coupler

Siddharth Nambiar, M. Hemalatha, Tarun Sharma, and Shankar Kumar Selvaraja
CI_P_4 The European Conference on Lasers and Electro-Optics (CLEO_Europe) 2017

Uniaxial Fiber Bragg Grating based Accelerometer

Mohd Mansoor Khan, Umesh Tiwari, Nishtha Panwar, Ravi Dhawan, Subhash C. Jain, R. Bhatnagar, Rajeev Garg, and Pawan Kapur
TPo.29 International Conference on Fibre Optics and Photonics (Photonics) 2012


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access Optica Member Subscription

Select as filters

Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved