Abstract
We implemented germanium ion implantation based refractive index change in integrated photonics devices for device trimming. Partial annealing of the ion implanted section revealed the possibility to permanently adjust the resonant wavelength peak position to a target wavelength.
© 2017 Optical Society of America
PDF ArticleMore Like This
Akhil Varri, Frank Brückerhoff-Plückelmann, Shabna Taheriniya, Daniel Bernhardt, Torsten Richter, Gerhard Wilde, and Wolfra H. Pernice
JW2A.12 CLEO: Applications and Technology (CLEO:A&T) 2023
Enrico Prati, Takahiro Shinada, and Takashi Tanii
QTh7B.10 Quantum 2.0 (QUANTUM) 2020
Xia Chen, Milan M. Milosevic, Ali Z. Khokhar, David J. Thomson, and Graham T. Reed
Th3C.3 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2018