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  • 2017 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2017),
  • paper s1915

Ion implantation in silicon for photonic device trimming

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We implemented germanium ion implantation based refractive index change in integrated photonics devices for device trimming. Partial annealing of the ion implanted section revealed the possibility to permanently adjust the resonant wavelength peak position to a target wavelength.

© 2017 Optical Society of America

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