Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • 2017 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2017),
  • paper s1915

Ion implantation in silicon for photonic device trimming

Not Accessible

Your library or personal account may give you access

Abstract

We implemented germanium ion implantation based refractive index change in integrated photonics devices for device trimming. Partial annealing of the ion implanted section revealed the possibility to permanently adjust the resonant wavelength peak position to a target wavelength.

© 2017 Optical Society of America

PDF Article
More Like This
Optical Waveguides by Germanium Ion Implantation on Silicon-on-Insulator Platform

Xia Chen, Milan M. Milosevic, Ali Z. Khokhar, David J. Thomson, and Graham T. Reed
Th3C.3 Conference on Lasers and Electro-Optics/Pacific Rim (CLEOPR) 2018

Monitoring and Trimming of Integrated Silicon Photonic Circuits via Laser Irradiation

Vera Biryukova, Charalambos Klitis, and Marc Sorel
SW3F.4 CLEO: Science and Innovations (CLEO_SI) 2020

Single Ion Implanted Silicon Devices Towards Few Photons Emission Regime For Space Quantum Communications

Enrico Prati, Takahiro Shinada, and Takashi Tanii
QTh7B.10 Quantum 2.0 (QUANTUM) 2020

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved