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  • 2017 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2017),
  • paper s2507

Phase shifting interferometer of a femtosecond laser for optical surface measurement*

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Abstract

We demonstrate a low coherence phase shifting interferometer of a femtosecond laser for optical surface measurement. Phase shifting is realized by sweeping the repetition rate instead of the mechanical scanning. With this method, we reconstruct a glass slide surface which agrees well with that measured by a commercial Fizeau interferometer.

© 2017 Optical Society of America

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