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  • 2017 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2017),
  • paper s2725

Quadrature Phase-shifting Interferometry For Surface Micro-topography Measurement

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Abstract

Two-step phase-shifting (TSPS) algorithm is employed to reconstruct the object with only two in-line interferograms. The average measured value matches quite well with the nominal value. The uncertainty budget was calculated to be 10% of the measured value.

© 2017 Optical Society of America

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