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High-resolution Accurate Mosaic Imaging Technique for Laser Micro-fabrication using Motion-blur Compensation

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Abstract

In this paper, high-resolution and accurate imaging and mosaicing techniques for laser micro-fabrication target are described. The effectiveness of methods are validated for capturing 0.5 μm/pixel images and mosaicing with featureless patterned images.

© 2018 The Author(s)

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