Fabrication of Spherical Concave for Waveguide-to-fiber Vertical Coupling Based on Gray-tone Optical Lithography

Xueting Wang; Chuanlu Deng; Yi Huang; Ruhuan Zhang; Xiaobei Zhang; Tingyun Wang

doi:10.1364/CLEOPR.2020.P2_24

14th Pacific Rim Conference on Lasers and Electro-Optics (CLEO PR 2020)
OSA Technical Digest (Optica Publishing Group, 2020),
paper P2_24
•https://doi.org/10.1364/CLEOPR.2020.P2_24

Fabrication of Spherical Concave for Waveguide-to-fiber Vertical Coupling Based on Gray-tone Optical Lithography

Xueting Wang, Chuanlu Deng, Yi Huang, Ruhuan Zhang, Xiaobei Zhang, and Tingyun Wang

Conference on Lasers and Electro-Optics/Pacific Rim 2020

Sydney Australia
3–5 August 2020
ISBN: 978-0-646-82504-5

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Poster Presentations - 2 (P2)

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X. Wang, C. Deng, Y. Huang, R. Zhang, X. Zhang, and T. Wang, "Fabrication of Spherical Concave for Waveguide-to-fiber Vertical Coupling Based on Gray-tone Optical Lithography," in 14th Pacific Rim Conference on Lasers and Electro-Optics (CLEO PR 2020), OSA Technical Digest (Optica Publishing Group, 2020), paper P2_24.

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Abstract

We propose a novel fabrication of total internal reflection spherical concave with polymer material by gray-tone optical lithography on printed circuit boards for vertical optical coupling between waveguides and optoelectronic devices.

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