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Conferences > CLEOPR > 2022 > CThP8F > CThP8F_01

Integrated Silicon photodetectors in Silicon Nitride-on-SOI platform

Shankar Kumar Selvaraja, Avijit Chatterjee, and Siddharth Nambiar

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Abstract

In this talk, we shall discuss the strategies to integrate silicon photodetector in silicon nitride-on-SOI platform. We shall discuss device design, fabrication challenges and measurement results of detectors for potential sensor and high-speed applications.

© 2022 IEEE

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