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High-speed, step-like optical beam scanning using Si photonics SLG beam scanner for FMCW LiDAR

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Abstract

In Si FMCW LiDAR incorporating SLG scanner, the beam drifts during the frequency modulation. We compensated for this drift using smart thermo-optic control. Through space-time observations, we confirmed fast step-like beam scanning and high-resolution ranging.

© 2022 IEEE

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